Float law polish exceeds slick surface processing technique

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Technology of polish of summary float law appears at Japan above all, it is one of advanced techniques that treatment exceeds slick surface. Article introduction machines process of the rigid structure that exceeds slick surface and treatment with float law polish, undertake comparative with traditional bitumen polish method, analyse material purify mechanism. Introduce our country simply finally to study the progress of technology of float law polish. Text one, the treatment of the generation of technology of float law polish and spare parts of current situation optics includes cut basically to shape, abrade, polish 3 working procedure; Final optical surface quality is decided by polishing, because this polish is the most important working procedure. High quality is normally smooth exterior polish is with the flexibility such as bitumen or fiber material makes millstones, match with polishing fluid or abrade cream will achieve technical requirement. In recent years, optics and microelectronics promoted the development of optical processing technique greatly. Large-scale or VLSI is used to place base piece (wait for material for silicon, germanium normally) exterior precision raised very tall requirement; The development of optics of short wave band especially of powerful laser technology appear, very slashing to the requirement of surface roughness of optical component surface. Exterior surface roughness the exceeds slick surface processing technique to already made optics and field of microelectronics foundation technology main task under 1nm Rms. The optical treatment method that relies on traditional experience dependence is requirement of the optics that cannot satisfy day to be exhibited inereasingly, electronics. Domestic and internationally already a lot of scientists machine high accuracy to exceed all sorts of technologies of slick surface in exploration. General and atomic diameter is less than 0.

3nm, and super- slick surface is microcosmic fluctuant mean effective value is dimension of a few atomic, because this implementation exceeds slick surface,the key of treatment depends on realizing exterior material atomic weight the purify of class. 1997, difficult Professor Boyizhi of university of Japanese big slope invented float law polish (Float Polishing) treatment exceeds slick surface technology. Through using this technology, can make the flat surface form of corundum single crystal achieves λ / 20, exterior surface roughness under 1nm Rz. The research report 1987 makes clear, technology of use float law has the polishing test of a variety of material, to the job of φ 180mm, can achieve O of excel of exterior surface roughness.

2nm Rms, flatness excel λ / 20=0.

03 μ M. Be in Japan at present, application of technology of float law polish is very wide, the magnetic head that is used at recorder, videocorder or computer especially is produced; Every year 25 million magnetic head use this technology to make namely. In recent years, germany also is studying similar polish technology. The Ou Wei of German Ulm university (O.

Weis) considers to make clear, the workpiece of the φ 7mm of dialogue gem material undertakes polishing, exterior surface roughness is achieved to be less than after 30 minutes 0.

The result of 05nm. Can discover sample of float law polish and common polish sample to float law polish has a lot of advantages quite. Polish of common bitumen type uses hardness to be more than the abrasive of workpiece, also can obtain alleged the surface roughness target that exceeds slick surface, but have very much to the correction of the flatness of millstones exquisite, this influence arrives by the face form of polishing workpiece. The workpiece after common polish, dimension of its brim geometry always not quite good, often have collapse edge or become warped edge phenomenon; And be in the surface can see times higher have plasticity distortion layer below microscope. Apply what technology of law of float law polish obtains to exceed slick surface, have better exterior surface roughness and brim geometry figure not only, and rational of polishing crystal face thinks in good condition crystal lattice, inferior the surface did not destroy a layer, and by the minimum of exterior remains stress that polishing causes. 2, construction is similar to the machinery of the rigid structure of float law polisher and polisher of law of polishing process float to place polisher surely. Before undertaking float law polish to workpiece, should be undertaken above all by treatment workpiece beforehand polishing, dry. OK float law polish. In polishing process, polishing fluid rotates along with millstones; Because the fluid carries movables gives birth to dynamic pressure, one is formed between workpiece and millstones thin thin lilquid film, make workpiece float rotates on millstones, maintain soft contact. The grain that the centrifugation when the liquid rotates makes the granuality in polishing fluid largish is swung all around, sink after all gradually ministry, the abrasive in the lilquid film that is placed between millstones and workpiece so is more and more careful and even; Be machined optical surface is slicker and slicker, achieve finally super- smooth. The face form of workpiece basically is decided by millstones face form, in float law polish, as a result of the character of stannic material itself, its hardness reachs fluidity moderate, in the stannum in polishing dish wear away negligible, consequently stannum dish flatness is very easy pilot; Assured the stability of work area form so. As a result of,the experience sex of traditional polish basically is bitumen dish be out of shape in polishing of the decision; Use stannum dish hind, polish of sex of this kind of experience can become stable polish. 3, the surface roughness of surface of polish of law of purify mechanism float of float law polish can achieve Yanami to measure level, approach atomic size, the purify of workpiece material undertakes on atomic level. Workpiece surface atom is bumped atomicly in abrasive workpiece main body is broken away from below action, thereby by purify. Atomic purify process, it is abrasive and workpiece the collision in atomic level, diffuse, fill process. 4, of abrasive choose a ground purify mechanism, use the difference of outside facing and binding energy of main body atom, any material can regard surface layer of abrasive purify workpiece as atom, can gain the face that does not have crystal lattice amlposition and distortion. In undertaking float law exceeds the polish of slick surface, it is very important to choose right stuff to serve as abrasive. The abrasive that is used at float law polish commonly makes an appointment with the SiO2 small pink of 7nm for granuality. The place on put together is narrated, the key of technology of float law polish depends on: The stannum of precision of high area form dish, will assure the high accuracy of work area form with this. Granuality is less than the abrasive of 20nm, the purpose depends on increasing the interface of workpiece and millstones to accumulate, the collision opportunity of grain of abrasive of grow in quantity and workpiece surface, achieve the goal of purify of atomic weight class. Polishing fluid mixes workpiece millstones immersion, rely on fluid action to form the lilquid film between workpiece and millstones, the collision that is abrasive grain and workpiece provides an environment. 5, the place of smooth machine of Changchun of research current situation of our country applies optical state key laboratory, drive optically in short wave band, begin to research technology of float law polish from 1992, already developed a prototype of principle of a polish, had a large number of tests. Make clear as a result to the polishing experiment of K9 glass print at present, 1nmRa of excel of exterior surface roughness. What use abrasive granuality to be 25nm about. Concerned experiment is in proceed, and the prototype of experiment of float law polish of a high accuracy is in development. CNC Milling CNC Machining